IT.PS.X100.AL.CS

The PSX100 stages are designed to seemlessly integrate into metrology applications, nano-motion machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications. The unique internal flexure design provides wear-free and highly planar motion. 

Specifications

IT.PS.X25.AL.CS

 The PSX25 stages are designed to seemlessly integrate into picoscale metrology applications, nanomagnetic research, nano-scale machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications. The unique internal flexure design provides wear-free and highly planar motion. 

Specifications

IT.PS.X5.TI.CS

This nanopositioning stage is a single axis stage and is ultra compact at only 19 mm x 13 mm x 5.5 mm. The stage is capable of 5 um closed loop motion, positioning resolution to 100 picometers and a stiffness of 40 N per micrometer.

Specifications

IT.PS.X50.AL.CS

Specifications

IT.PS.X500.AL.CS

This stage is designed for manufacturing applications that require high stroke, high stiffness and high force. Example applications include servo tools, miniature presses and load testing. 

Specifications

IT.PS.X500.AL.SG.A

This is a high stroke piezo driven stage with 500 um of motion when operated with -30 to +150 volts. The stage is designed for microscopy applications with a large aperature of 95 mm diameter and a low height profile of 18.5 mm.

Specifications

IT.PS.X500.ST.CS

This stage is designed for manufacturing applications that require high stroke, high stiffness and high force. Example applications include servo tools, miniature presses and load testing. 

Specifications

IT.PS.Z100.SS.CS

This vertical lift stage is made from a strainless steel grade material and has exceptional mechanical stiffness of 2.5 Newtons per micrometers on the stage output. This is ideal for applications needing to control up to 5 kilograms of load in the verticle axis using a compact stage.

Specifications

IT.PS.X100Y100.AL.CS

 The PSX100Y100 stages are designed to seemlessly integrate into metrology applications, nano-motion machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications. The unique internal flexure design provides wear-free and highly planar motion. 

Specifications

IT.PS.X25Y25.AL.CS

Specifications

IT.PS.X50Y50.AL.CS

Specifications

IT.PS.X100Y100Z100.AL.CS

Specifications

Notation:
^a positioning noise measured with a 10 Hz and 100 Hz filter
^b uses a digital interpolation table

IT.PS.X50Y50Z50.AL.CS

Specifications

Notation:
^a positioning noise measured with a 10 Hz and 100 Hz filter
^b uses a digital interpolation table

Custom Electronics and Controllers

Custom electronics and digital controllers are available for our nano-motion products and custom stages. Generally, custom electronics will depend upon the stage and user interface requirements. A brief list of our staff's capabilities are listed below: 

Highlights: 

• High voltage amplifiers with 1 kV
• Output power up to 1 kW
• Custom graphical user interface for host computers
• USB and ethernet connectivity between host computer and controller
• Liquid and air PZT cooling
• Digital interface on front of controller
• Higher precision converters
• Analog controls

Specifications

Custom flexure stages

InSituTec's technical staff comprises doctoral engineers specializing in precision machine design, flexure analysis and general mechatronics. Our specialty is to provide customer's with nano-motion stages that are tailored to meet their requirements. Typically, customers approach us on challenging mechanical design problems and we are commissioned to design and build to their challenging specifications. A list of capabilities is discussed below to provide the user with background in our capability. In addition, we provide links to papers we have written located on our knowledge library website.

Specifications

Ultra Precision Rotary Spindles

We develop high end precision rotary tables based around our patented kinematic polymer spindle designs. The tables do not need air and are capable of < 3 nm asynchronous error motion. They provide exceptional motion capability at speeds up to 60 RPM. Optional configurations are shown below:

Options Available: 

• Electrical feedthroughs using precision slip rings to rotate sensors
• Control rotary axis < 0.1 arc second
• Speeds up to 60 RPM
• Custom designs for different sizes and payload configurations
• Motor control with frameless motor
• Compact sizes avialable
• Spindle with aperature available

Specifications

IT.DC.PS.1.300

The DC.PS.1.300 digital controller is a single axis controller equipped with high speed precision digital architecture and 1000 volt amplifier. The chassis encompasses high speed precision converters with capability of achieving displacement precision > 1:400,000 at 2 kHz sampling rates and controller loop rates up to 33 micro-seconds. 

The DC.PS.1.300 enables input shaping, feedforward and standard PID controles for fast settling time capability with a user friendly display and keypad. In particular, the input shaping is designed to enable the user to easily tune the nanopositioning stage system and achieve fast settling times.

Features include: 

• Precision at 1:400,000 at 2 kHz sampling rates.
• 33 microseconds control loop rates.
• 1000 volt amplifier with 300 mA current capability.
• Digitally tune your input signal using input shaping to suppress unwanted natural frequencies.
• Adjust feedforward velocity gain term to improve settling times.
• User friendly keypad and display to program settings.
• Settings automatically store to an EPROM when unit is powered off and on.

Specifications

IT.DC.PS.1.50

The IT.DC.PS.1.50 digital controller is based on a high speed precision digital architecture. The chassis encompasses high speed precision converters with capability of achieving displacement precision > 1:400,000 at 2 kHz sampling rates and controller loop rates up to 33 micro-seconds. 

The IT.DC.PS.1.50 enables input shaping, feedforward and standard PID controles for fast settling time capability with a user friendly display and keypad. In particular, the input shaping is designed to enable the user to easily tune the nanopositioning stage system and achieve fast settling times.

Features include: 

• Precision at 1:400,000 at 2 kHz sampling rates.
• 33 microseconds control loop rates.
• Less than 100 micro-volt RMS PZT amplifier noise over a 180 volt range.
• Digitally tune your input signal using input shaping to suppress unwanted natural frequencies.
• Adjust feedforward velocity gain term to improve settling times.
• User friendly keypad and display to program settings.
• Settings automatically store to an EPROM when unit is powered off and on.

Specifications

XY-RDC

InSituTec's digital controllers are designed with the latest FPGA based high speed processors and 16 bit converters with high speed update rates. The controllers are capable of reading and controlling a piezo driven stage with precision better than 1 part 10⁷. Standard closed loop control algorithms include PID but can be extended to feedforward controls if the application requires more demanding motion control and minimal following error. Also, each controller is equipped with ultra high precision power amplifiers with extremely low noise measured at <100 µV RMS over a 180 volt range.

Controller Highlights: 

• Calibration look up tables for high accuracy
• Optional USB interface to control and read from GUI
• Obtain precision higher than 1 part 10⁷
• Higher PZT power amplifiers available up to 1 kW
• Feedforward controles optionally available

Specifications

XYZ-RDC

InSituTec's digital controllers are designed with the latest FPGA based high speed processors and 16 bit converters with high speed update rates. The controllers are capable of reading and controlling a piezo driven stage with precision better than 1 part 10⁷. Standard closed loop control algorithms include PID but can be extended to feedforward controls if the application requires more demanding motion control and minimal following error. Also, each controller is equipped with ultra high precision power amplifiers with extremely low noise measured at <100 µV RMS over a 180 volt range.

Controller Highlights: 

• Calibration look up tables for high accuracy
• Optional USB interface to control and read from GUI
• Obtain precision higher than 1 part 10⁷
• Higher PZT power amplifiers available up to 1 kW
• Feedforward controles optionally available

Specifications