AccuSurf 3D

The AccuSurf Gauging System incorporates a state-of-the-art nanometer repeatable rotary axis with a multi-axis active scanning head. This advanced gauging system provides the ability to measure complex 3D surface profiles with < 20 nm repeatability, is capable of high scanning speeds with 1000’s of data points collected per second, has scanning forces less than 100 nN.

The AccuSurf gauge when accompanied with the MicroTouch Sensor System will extend, the functionality of a CMM to enable microscale form measurements, nanoscale surface metrology, and roundness, tasks that would otherwise require 3 different machines. This provides ability to measure shapes and parts that were otherwise difficult to measure such as freeform optics, inside channels and cavities of MEMS and soft exotic materials such as aerogels and roots of miniature threads.

Some Applications Using the AccuSurf 3D and MicroTouch

• Implantable microscale medical devices: hearing aid, pace maker, endoscope
• Telecommunications: optical camera cell phone lenses
• Spinal and Biologics: orthopedic bearing surfaces
• Automotive: rocker arms, diesel injectors, cams
• Soft materials: plastics and peek

Specifications

The AccuSurf is designed to rotate and scan a force probe with at least one axis of sensitivity or more. As a result, the rotary axis and radial scanner specifications are listed below showing the gauge heads' motion control capability.

PreCess 2D

The PreCess 2D is a precision in-process gauge head that features

• 2 axis measurement with less than 50 nm accuracy
• high speed scanning up to 600 mm/s
• scanning or touch triggering modes
• crash and overtravel protection
• accept probe arms with very high lengths up to 200 mm
• thermally insensitive to temperature swings
• easily read gauge signals
• easily integrate to your machine
• compeititvely priced

The PreCess differentiates among competing technologies in “Dynamic Precision” or the inherent ability to reproduce highly accurate measurements at rapid speeds. This is important when considering high quality control measurements and high throughput demands on the manufacturing floor. Using highly precise movers or measuring machines with the gauge, the probe’s fast and precise scanning response is unparalleled in the metrology industry. Mounting the gauge head with a highly precise mover or measuring machine is of course critically important. However, many vendors provide precision movers but few provide precision gauging products with less than 50 nm accuracies while maintaining fast scanning speeds.

Specifications

MicroTouch

InsituTec’s MicroTouch sensor is a metrology sensor with the capability of providing cost effective measurement of microscale parts and features that currently cannot be measured. This technology overcomes the shortcoming of existing techniques because it can measure high aspect ratio features, is highly repeatable because it does not stick to the surface, and provides high data rate scanning capability. In addition it provides the ability to combine three traditionally separate measurement capabilities, surface finish, form, and roundness into one instrument.

The MicroTouch sensor is a revolutionary new tactile probe designed for quality control of microscale manufacturing. The probes are typically 7 μm in diameter, 3.5 mm in length, and contact parts with < 100 nN forces. The probes are capable of measuring with 10 nm repeatability in contact and out-of-contact scanning modes.  As a result, the MicroTouch sensors are applicable to wide range of parts from silicon MEMS structures to exotic materials such as aerogel foams to more traditional materials such as steels for medical implant parts. Optical components with free form shapes will also benefit from this quality control device. We have provided a few specifications below related to the probes size and scanning ability. Contact us to discuss in more detail our capabilities and how they can meet your requirements and learn how the MicroTouch will add significant value to your micromanufacturing processes.

Measurement Applications: 

• Measure high aspect ratio microstructures
• Inspect Surface Wear on Thread Gauges
• Measure Very Delicate Surfaces
• Scan microscale optics
• Inspect microscale holes 

Specifications